Advances in Rapid Thermal and Integrated Processing

Advances in Rapid Thermal and Integrated Processing

Roozeboom, Fred (EDT)

R 11 345.00

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21 Sep 2026
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Description

Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level.

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