Plasma Etching: Fundamentals and Applications
Fundamentals and Applications
R 7 970.00
Takealot ยท checked 4 days ago
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- First indexed
- 24 Sep 2026
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- Takealot
Description
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.