Tribology Issues and Opportunities in Mems: Proceedings of the Nsf/Afosr/Asme Workshop on Tribology Issues and Opportunities in Mems Held in Columbus,
Proceedings of the NSF/AFOSR/ASME Workshop on Tribology Issues and Opportunities in MEMS held in Columbus, Ohio, U.S.A., 9-11 November 1997
R 8 359.00
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Description
Micro electro-mechanical systems (MEMS) is a fast-growing industry. This volume is comprised of the proceedings of a workshop on tribology issues, which convened in November 1997. Its aim was to promote better tribological understanding of MEMS which should benefit micromachining and IT in general.