Rapid Thermal Processing of Semiconductors
Borisenko, Victor E.
Takealot ยท checked 11 days ago
- Average
- R 7 895.00
- Lowest seen
- R 7 791.00
- Highest seen
- R 7 895.00
- Last change
- -R 104.00
- First indexed
- 28 Sep 2026
- Retailer
- Takealot
Description
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions.
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
